Phase Object Reconstruction for 4D-STEM using Deep Learning

نویسندگان

چکیده

Abstract In this study, we explore the possibility to use deep learning for reconstruction of phase images from 4D scanning transmission electron microscopy (4D-STEM) data. The process can be divided into two main steps. First, complex wave function is recovered a convergent beam diffraction pattern (CBED) using convolutional neural network (CNN). Subsequently, corresponding patch object approximation. Repeating each scan position in 4D-STEM dataset and combining patches by summation yields full-phase object. Each kernel 3×3 adjacent CBEDs only, which eliminates common, large memory requirements enables live processing during an experiment. machine pipeline, data generation, algorithm are presented. We demonstrate that CNN retrieve information beyond aperture angle, enabling super-resolution imaging. image contrast formation evaluated showing dependence on thickness atomic column type. Columns containing light heavy elements imaged simultaneously distinguishable. combination super-resolution, good noise robustness, intuitive characteristics makes approach unique among imaging methods 4D-STEM.

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ژورنال

عنوان ژورنال: Microscopy and Microanalysis

سال: 2023

ISSN: ['1435-8115', '1431-9276']

DOI: https://doi.org/10.1093/micmic/ozac002